Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus
AssigneesPhiltech Inc., Shinko Electric Industries Co., Ltd.
InventorsYuji Furumura, Naomi Mura, Koki Tamagawa, Tadayoshi Yoshikawa, Hiroshi Yonekura
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Abstract
A substrate including a sensor unit, wherein the sensor unit includes a coil wound at least once arranged on the surface of the sensor or embedded within and near the surface thereof. With such an arrangement, an electric current that corresponds to information with respect to the substrate flows through the coil.
Claims20
A substrate including a sensor unit, wherein the sensor unit includes a coil wound at least once arranged on the surface of the sensor or embedded within and near the surface thereof,
- and wherein an electric current that corresponds to information with respect to the substrate flows through the coil.
A substrate including a sensor unit, wherein the sensor unit includes:
- an SAW resonator;
- and
- an antenna unit electrically connected to the SAW resonator,
- and wherein the electric current, which corresponds to information with respect to the substrate and the direction of which changes according to the resonance frequency of the SAW resonator, flows through the antenna unit.
Dependencies are inferred from the claim text.