Broad-range magnetic sensor and manufacturing process thereof
AssigneeSTMicroelectronics S.r.l.
InventorsCATERINA RIVA, Marco Morelli, Marco Marchesi
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Abstract
A magnetic sensor is formed by a fluxgate sensor and by at least one Hall sensor integrated in a same integrated device, wherein the magnetic core of the fluxgate sensor is formed by a magnetic region that operates also as a concentrator for the Hall sensor. The magnetic region is manufactured in a post-machining stage on the metallization layers wherein the energizing coil and sensing coil of the fluxgate sensor are formed; the energizing and sensing coils are formed on a semiconductor substrate housing the conductive regions of the Hall sensor.
Claims11
A magnetic sensor, comprising a fluxgate sensor and a Hall sensor integrated in a same integrated device.
A process for manufacturing a magnetic sensor, comprising the step of:
- forming a fluxgate sensor and a Hall sensor in a same integrated device.
Dependencies are inferred from the claim text.