Image sensor pixel and method thereof
AssigneesCheol Soo Park, Siliconfile Technologies Inc.
InventorCheol Soo Park
Life of this patent
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Abstract
A method of manufacturing a pixel of an image sensor including a protruded photodiode capable of improving photosensitivity and reducing crosstalk between neighboring pixels and a pixel of an image sensor formed using the method are provided. The pixel of the semiconductor image sensor includes a protrudedly shaped photodiode on a surface of a semiconductor substrate. A surface area of the photodiode with respect to a surface area of the image sensor pixel increases to improve photosensitivity, and a microlens is not needed due to the improvement of the fill factor. In addition, the crosstalk of neighboring pixels can be removed.
Claims12
A pixel of a semiconductor image sensor comprising a photodiode having a protruded shape on a surface of a semiconductor substrate.
A pixel of a semiconductor image sensor comprising:
- a photodiode formed under a surface of a semiconductor substrate;
- and
- a photodiode having a protruded shape on the surface of the semiconductor substrate.
A pixel of a semiconductor image sensor comprising:
- a first photodiode formed under a surface of a semiconductor substrate;
- and
- a second photodiode having a protruded shape on the surface of the semiconductor substrate, which is located over the first photodiode.
A method of manufacturing a pixel of an image sensor, the method comprising:
- (a) forming a first region having an opposite type with respect to a semiconductor substrate by performing ion implantation into the substrate;
- and
- (b) forming an epitaxial layer having a predetermined thickness on the substrate.
A method of manufacturing a pixel of an image sensor, the method comprising:
- forming a first region having an opposite type with respect to a semiconductor substrate by performing ion implantation into the substrate;
- forming an epitaxial layer having a predetermined thickness on the substrate;
- and
- implanting ions into the epitaxial layer.
Dependencies are inferred from the claim text.