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US 2010/0133638 A1Published application
Image sensors and methods of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJong Eun Park, Jung Chak Ahn, Yong Jei Lee, Dong-Yoon Jang
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Abstract
An image sensor includes a plurality of photodiodes, a plurality of wells isolating the plurality of photodiodes from each other, and a plurality of conductive layers or conductive lines for suppressing a dark current generated at the surface of the photodiodes and in the wells in response to a bias voltage.
Claims17
An image sensor comprising:
- a plurality of photodiodes;
- a plurality of wells isolating the plurality of photodiodes from each other;
- and
- a plurality of metal layers configured to receive a bias voltage, each of the plurality of metal layers being formed below a corresponding one of the plurality of photodiodes.
1 more element
A method of manufacturing an image sensor, the method comprising:
- first etching a first region where a plurality of metal layers and a plurality of metal lines are formed;
- second etching a second region where the plurality of metal layers are formed;
- and
- forming the plurality of metal layers and the plurality of metal lines in the first and second regions;
- wherein
- each of the plurality of metal layers is formed below a respective one of the plurality of photodiodes, and
- the plurality of metal layers are configured to receive a bias voltage.
4 more elements
A method of manufacturing an image sensor, the method comprising:
- forming a plurality of metal layers, each of the plurality of metal layers being formed to correspond to one of a plurality of photodiodes;
- forming a plurality of contacts for supplying electric power to the plurality of metal layers;
- and
- forming a plurality of interconnecting metal lines;
- wherein
- each of the plurality of metal layers are formed below a corresponding one of the plurality of photodiodes, and
- the plurality of metal layers are configured to receive a bias voltage.
4 more elements
An image sensor comprising:
- a plurality of photodiodes;
- a plurality of wells isolating the plurality of photodiodes from each other;
- and
- a plurality of conductive lines, each of the plurality of conductive lines being formed above a corresponding one of the plurality of photodiodes and a well adjacent to the photodiode, the plurality of conductive lines being configured to receive a bias voltage.
1 more element
Dependencies are inferred from the claim text.