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US 2010/0133604 A1Published application
Semiconductor Devices Having Gate Structures with Conductive Patterns of Different Widths and Methods of Fabricating Such Devices
AssigneeSamsung Electronics Co., Ltd.
InventorsJu-Hyung Kim, Chang-Seok Kang, Sung-Il Chang, Young-Woo Park, Jung-Dal Choi
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Abstract
A semiconductor device and a method of fabricating the same are provided. The semiconductor device includes a first dielectric pattern, a data storage pattern and a second dielectric pattern, which are sequentially stacked on a semiconductor substrate. A first conductive pattern is provided on the second dielectric pattern. A second conductive pattern having a greater width than the first conductive pattern is provided on the first conductive pattern.
Claims11
A semiconductor device, comprising:
- a first dielectric pattern on a semiconductor substrate;
- a data storage pattern on the first dielectric pattern;
- a second dielectric pattern on the data storage pattern so that the data storage pattern is between the first and second dielectric patterns;
- a first conductive pattern on the second dielectric pattern;
- and
- a second conductive pattern on the first conductive pattern so that the first conductive pattern is between the second dielectric pattern and the second conductive pattern,
- wherein the first conductive pattern has a first width that is less than a second width of the second conductive pattern.
4 more elements
11-18. (canceled)
Dependencies are inferred from the claim text.