Semiconductor Sensor
AssigneeMicrogan GmbH
InventorsMike Kunze, Ingo Daumiler
Life of this patent
Estimating the term…
Abstract
A semiconductor sensor determines physical and/or chemical properties of a medium, in particular a pH sensor. The semiconductor sensor has an electronic component with a sensitive surface, said component being constructed for its part on the basis of semiconductors with a large band gap (wide-gap semiconductor). The sensitive surface is provided at least in regions with a functional layer sequence which has an ion-sensitive surface. The functional layer sequence has at least one layer which is impermeable at least for the medium and/or the materials or ions to be determined.
Claims46
1-31. (canceled)
A semiconductor sensor for determining at least one of physical properties and chemical properties of a medium, comprising:
- an electronic component with a sensitive surface, the electronic component being constructed on the basis of semiconductors with a large band gap, the sensitive surface, at least in regions with a functional layer sequence, having an ion-sensitive surface, the ion-sensitive surface being orientated away from the sensitive surface and is coated with at least one layer, the functional layer sequence being impermeable at least for at least one of (a) the medium and (b) one of materials and ions to be determined.
Use of a semiconductor sensor for detecting at least one of physical properties and chemical properties of a medium, the sensor comprising an electronic component with a sensitive surface, the electronic component being constructed on the basis of semiconductors with a large band gap, the sensitive surface, at least in regions with a functional layer sequence, having an ion-sensitive surface, the ion-sensitive surface being orientated away from the sensitive surface and is coated with at least one layer, the functional layer sequence being impermeable at least for at least one of (a) the medium and (b) one of materials and ions to be determined.
Dependencies are inferred from the claim text.