Object-Positioning Device for Charged-Particle Beam System
AssigneeJEOL Ltd.
InventorMitsuru Hamochi
Life of this patent
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Abstract
An object-positioning device comprises a rod-like object holder inserted in the chamber of a charged-particle beam system for moving the object outside the chamber, a support for slideably supporting at least a part of the side surface of the object holder, thus making the rear end of the holder outside the chamber a free end, and a vibration-absorbing portion mounted on the rear end of the object holder. The vibration-absorbing portion has an operating range in which vibrational frequencies in a translational direction perpendicular to the longitudinal direction of the object holder are absorbed. The natural vibrational frequency of the object holder in the bending mode is included within the operating range of the vibration-absorbing portion.
Claims5
An object-positioning device for use in a charged-particle beam system, said object-positioning device extending into an evacuateable chamber comprising:
- an object holder holding an object capable of being removably inserted in the charged-particle beam system, the object holder being used to manipulate the position of the object from outside the chamber, the object holder being shaped cylindrically or like a rod, the object holder having a rear end outside the chamber, the object holder having a natural vibrational frequency in its bending mode;
- support means supporting at least one portion of a side surface of the object holder such that the holder can slide and that the rear end of the object holder is made a free end;
- and
- a vibration-absorbing portion mounted to the rear end of the object holder outside the chamber side and acting to absorb vibrations of the object holder,
- wherein the vibration-absorbing portion has an operating frequency range in which vibrations are absorbed in a translational direction perpendicular to a longitudinal direction of the object holder, and
- wherein said natural vibrational frequency of the object holder in the bending mode is included within the operating frequency range of the vibration-absorbing portion.
Dependencies are inferred from the claim text.