Ion beam control apparatus and method

An ion beam control apparatus which includes an opening at a central part, and in which at least a pair of electrodes arranged to face each other is provided, an ion beam is input from a perpendicular direction of the opening, and in a phase where an inclined part having a radio frequency electric field intensity that accelerates or decelerates the ion beam, to the pair of electrodes the radio frequency is applied so as to cause the energy of the ion beam to focus on a specific energy for acceleration, wherein

• at least another pair of electrodes arranged to face each other is provided with respect to the pair of electrodes, and
• an ion beam is converged on the other pair of electrodes by an electric field component facing a beam center direction by applying radio frequency in a direction of accelerating the ions between an intermediate part of the other pair of electrodes and an electrode on an ion input side.

An ion beam control method, comprising:

• a step of inputting an ion beam;
• and
• a step of repeating phase rotation by a radio frequency electric field that increases existing probability with a prescribed level of energy multiple times so as to achieve a prescribed level of energy expansion and a prescribed diameter in a radial direction.