Rapid Thermal Processing Chamber With Micro-Positioning System
AssigneeApplied Materials, Inc.
InventorsKhurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron M. Hunger, Blake R. Koelmel, Alexander N. Lerner, Nir Merry
Life of this patent
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Abstract
Methods and apparatus for rapid thermal processing of a planar substrate including axially aligning the substrate with a substrate support or with an empirically determined position are described. The methods and apparatus include a sensor system that determines the relative orientations of the substrate and the substrate support.
Claims22
A rapid thermal processing apparatus for processing a planar substrate, the apparatus comprising:
- a chamber including a heat source;
- a first substrate support for holding the substrate in the chamber in a first position;
- a second substrate support in a second position for holding the substrate during thermal processing, the second substrate support being movable in a direction to place the substrate closer and further from the heat source;
- and
- a sensor to sense the position of the substrate relative to the second substrate support, the sensor in communication with an actuator to change the position of the substrate relative to the axial position of the second substrate support.
The apparatus of claim 20, further comprising a magnetic field generating device coupled to the magnetically levitated rotor, the magnetic field being modifiable to move the levitated rotor in a plurality of axial directions within the plane of the substrate.
A method of processing a substrate, comprising:
- transferring a planar substrate having an edge into a processing chamber onto intermediate substrate support;
- determining the location of the edge of the substrate;
- adjusting the position of the substrate relative to a second substrate support so that the substrate and the second substrate support are in substantially centered orientation;
- transferring the substrate to the second substrate support;
- and
- thermally processing the substrate.
Dependencies are inferred from the claim text.