System and method for multibeam scanning
AssigneeAMO Development, LLC
InventorsZsolt Bor, Guy Holland
Life of this patent
Estimating the term…
Abstract
System and method of photoaltering a material. The system includes a laser source operable to produce a primary pulsed beam, a holographic optical element configured to receive the primary pulsed beam and transmit a plurality of secondary beams, and a scanner operable to direct the secondary beams to the material. The secondary beams are based on the primary pulsed beam. The method includes phase shifting a pulsed laser beam to produce an input beam, holographically altering the input beam to produce a plurality of transmission beams, and scanning a portion of the material with the transmission beams.
Claims27
A system for photoaltering a material, the system comprising:
- a laser source operable to produce a primary pulsed beam;
- a holographic optical element configured to receive the primary pulsed beam and transmit a plurality of secondary beams, the plurality of secondary beams based on the primary pulsed beam;
- and
- a scanner operable to direct the plurality of secondary beams to the material.
A system for photoaltering a material, the system comprising:
- a laser source operable to produce a primary pulsed beam;
- a first optical element configured to receive the primary pulsed beam and transmit a first secondary beam, the first secondary beam based on the primary pulsed beam and phase shifted from the primary pulsed beam by about a first quarter wavelength;
- a first polarizing beam splitter configured to reflect a first polarized beam and transmit a second polarized beam, the first and second polarized beams together based on the first secondary beam;
- a subsystem configured to produce a first transmission beam and a second transmission beam based on the first and second polarized beams, the first transmission beam angularly separated from the second transmission beam;
- and
- a scanner operable to direct the first and second transmission beams to the material.
A system for photoaltering a material, the system comprising:
- a laser source operable to produce a primary pulsed beam;
- an optical element having a reflectivity less than about 100%, the optical element configured to:
- receive the primary pulsed beam;
- reflect a first transmission beam;
- and
- transmit a secondary beam, the first transmission beam and the secondary beam together based on the primary pulsed beam;
- a mirror oriented non-parallel to the optical element, the mirror configured to reflect the secondary beam to the optical element, the optical element further configured to transmit a second transmission based on the secondary beam;
- and
- a scanner operable to direct the first and second transmission beams to the material.
A system for photoaltering a material, the system comprising:
- a laser source operable to produce a primary pulsed beam;
- an optical element configured to receive the primary pulsed beam and transmit a phase shifted beam, the phase shifted beam orthogonally polarized with the primary pulsed beam;
- a first Wollaston prism configured to:
- receive the phase shifted beam;
- and
- transmit a first secondary beam and a second secondary beam, the first and second secondary beams together based on the phase shifted beam, the first secondary beam angularly separated from the second secondary beam;
- and
- a scanner operable to direct a first transmission beam and a second transmission beam to the material, the first and second transmission beams based on the first and second secondary beams.
A method of photoaltering a material, the method comprising the steps of:
- holographically altering an input beam to produce a plurality of transmission beams;
- and
- scanning a portion of the material with the plurality of transmission beams.
Dependencies are inferred from the claim text.