Laser processing apparatus
AssigneeDisco Corporation
InventorsKeiji Nomaru, Taiki Sawabe
Life of this patent
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Abstract
A laser processing apparatus including a detecting unit. The detecting unit includes a white light source for emitting white light, a focusing lens for focusing the white light to the workpiece, a first optical fiber for guiding the white light emitted from the white light source to the focusing lens, a detector for detecting the intensity of reflected light from the workpiece, and a second optical fiber for guiding the reflected light to the detector. Accordingly, the white light to be focused to the workpiece can be easily handled and only a wavelength component focused on the workpiece can be stably propagated.
Claims6
A laser processing apparatus comprising:
- holding means for holding a workpiece;
- processing laser beam applying means for applying a processing laser beam to said workpiece held by said holding means;
- a first focusing lens for focusing said processing laser beam to be applied to said workpiece;
- lens moving means for moving said first focusing lens in a direction perpendicular to a holding surface of said holding means;
- detecting means including a white light source for emitting white light, a second focusing lens for focusing said white light to said workpiece held by said holding means, a first optical fiber for guiding said white light emitted from said white light source to said second focusing lens, a detector for detecting the intensity of reflected light due to said white light focused by said second focusing lens and reflected on said workpiece, and a second optical fiber for guiding said reflected light to said detector;
- and
- control means for obtaining information on the surface of said workpiece according to the result of detection by said detector and controlling the operation of said laser processing apparatus by using said information.
Dependencies are inferred from the claim text.