Conveying Device Using Electrostatic Adsorbing Plate
AssigneeSeiren Co., Ltd.
InventorsHidemasa Araie, Kenichi Takashima, Susumu Takagi
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Abstract
Provided is a low-cost electrostatic attraction transfer apparatus which can perform high-speed transfer, stabilizes a contact status of an electrostatic attraction board with a film and the like and does not generate fine defects on an object to be transferred.
Claims16
A conveying device comprising an electrostatic adsorbing plate, said electrostatic adsorbing plate having an electrode portion in the interior thereof, and a voltage applying portion for applying voltage to said electrode portion, wherein an article to be conveyed is adsorbed and conveyed by utilizing an electrostatic force induced by applying voltage to said electrode portion from said voltage applying portion, wherein
- a peeling plate having a multitude of apertures is disposed on the article to be conveyed side with respect to said electrostatic adsorbing plate, said peeling plate being mounted in such a manner that one surface thereof can repeat a contact state and a non-contact state between it and a surface of said electrostatic adsorbing plate, and the surface of said electrostatic adsorbing plate is inclined relative to a surface of the article to be conveyed.
Dependencies are inferred from the claim text.