Valve and processing apparatus provided with the same

A valve provided between a chamber an inside of which may be maintained at reduced pressure and an evacuation apparatus that evacuates the chamber, the valve comprising:

• a first valve body including a first opening and a second opening that permit gaseous communication between the chamber and the evacuation apparatus;
• a sealing valve element that moves near/away from the second opening so as to open/close the second opening, the sealing valve element being located in the first valve body;
• a sealing member provided in the sealing valve element so as to seal the second opening when the sealing valve element closes the second opening;
• a valve element retreat area that is provided in an inner wall portion of the first valve body, the inner wall portion being away from the second opening, and shields the sealing member from an inner space of the first valve body when the sealing valve element is moved away from the second opening to the valve element retreat area;
• and
• a first pivot shaft that pivots the sealing valve element so that the sealing valve element may be located in one of the second opening and the valve element retreat area.