Substrate including channel part having chamber, and multistage liquid feed device comprising the same
AssigneePanasonic Corporation
InventorsNobuhiko Ozaki, Airi Takagi
Life of this patent
Estimating the term…
Abstract
A substrate including a channel part having a chamber in which a liquid can be fed stepwise from a chamber to another chamber at the channel part formed in the substrate, depending on the rotational speed of the substrate. A first chamber, a second chamber, a third chamber, and a channel interconnecting them are formed at the channel part formed in the substrate. Furthermore, the width and/or the depth of the first chamber is set smaller than the width and/or the depth of the second chamber. Consequently, the volume of solution subjected to centrifugal force in the first chamber is larger than the volume of solution subjected to centrifugal force in the second chamber.
Claims19
A substrate that is rotatable around an axis of rotation and that has a flow path part formed inside the substrate, wherein:
- the flow path part comprises:
- (A) a first chamber that has an injection inlet;
- (B) a second chamber that is placed in a position more distant from the axis of rotation than the first chamber;
- (C) a third chamber that is connected with outer atmosphere of the substrate via an air opening and that is placed in a position more distant from the axis of rotation than the second chamber;
- (D) a first flow path that communicates the first chamber and the second chamber, that has a first flow path end part connected with the first chamber and is placed in a position more distant from the axis of rotation than the injection inlet, and that has a second flow path end part connected with the second chamber;
- (E) a second flow path that communicates the second chamber and the third chamber, that has a third flow path end part connected with the second chamber and is not placed on a straight line connecting the axis of rotation and the second flow path end part, and that has a fourth flow path end part connected with the third chamber and placed in a position more distant from the axis of rotation than the second flow path end part and the air opening;
- a small amount of a solution is transferred stepwise in order of the first chamber, second chamber and third chamber;
- a cross-sectional area of a bottom surface of the first chamber near the first flow path end part is larger than the cross-sectional area of the first flow path near the first flow path end part;
- and
- an imaginary length of the first chamber is longer than an imaginary length of the second chamber,
- the imaginary length of the first chamber being the distance from the first flow path end part to a surface of the solution along the centripetal direction toward the axis of rotation, when a certain amount of solution is accommodated in the first chamber and the substrate rotates about the axis of rotation,
- the imaginary length of the second chamber being the distance from the third flow path end part to a surface of the solution along the centripetal direction toward the axis of rotation, when the certain amount of solution is accommodated in the second chamber and the substrate rotates about the axis of rotation.
Dependencies are inferred from the claim text.