Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
AssigneeJapan Super Quartz Corporation
InventorsMasaki MORIKAWA, Jun FURUKAWA, Satoshi KUDO
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AssigneeJapan Super Quartz Corporation
InventorsMasaki MORIKAWA, Jun FURUKAWA, Satoshi KUDO
Estimating the term…
A silica glass crucible for pulling up a silicon single crystal including a wall part, a corner part and a bottom part is provided with an outer layer formed from an opaque silica glass layer which includes many bubbles, and an inner layer formed from a transparent silica glass layer which substantially does not include bubbles, wherein at least one part of an inner surface of the wall part and the corner part being an uneven surface formed with multiple damaged parts having a depth of 50 μm or more and 450 μm or less, and wherein a region among the inner surface of the bottom part within a certain range from the center of the bottom part being a smooth surface which does is substantially not formed with damage.
A silica glass crucible for pulling up a silicon single crystal including a wall part, a corner part and a bottom part, comprising:
A silica glass crucible for pulling up a silicon single crystal including a wall part, a corner part and a bottom part, comprising:
A method for manufacturing a silica glass crucible, comprising:
Dependencies are inferred from the claim text.