Miniature acceleration sensor
AssigneeAustrian Research Centers GmbH - Arc
InventorsHubert Brückl, Michael Kast
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AssigneeAustrian Research Centers GmbH - Arc
InventorsHubert Brückl, Michael Kast
Estimating the term…
The invention relates to a miniature sensor for detecting acceleration and deceleration processes, which is characterized—in that it comprises at least one bar-like spring element which is formed by a nanowire (2), which is connected by one end (21) to the detector substrate (5) and projects from the latter and which preferably carries at it free end (22) a coating (3′) emitting a permanent magnetic stray field (ms), or a nanoparticle (3) of this type, wherein the nanowire and magnetic stray field coating, or mass, together form the inertial mass, and—in that a magnetic field detection layer (4), e.g. composed of magnetoresistive material, is arranged at least in the region near the connected end (21) of the nanowire (2),—wherein the substrate is preferably provided with such a layer which preferably, for its part, as sensor component forms a constituent part of a magnetic field detection unit (7).
1-14. (canceled)
A miniature sensor for detecting and determining acceleration and deceleration processes of an object, comprising:
Dependencies are inferred from the claim text.