Back to results
US 2010/0116823 A1Published application
Hydroformed fluid channels
AssigneeApplied Materials, Inc.
InventorsJames David Felsch, Anthony Vesci, Michael P. Karazim
Life of this patent
Estimating the term…
Abstract
A method and apparatus for providing a fluid channel on a surface that is subject to extreme temperatures is described. The embodiments described herein provide a fluid channel wherein the surface that is subject to the extreme temperatures forms one side of the fluid channel.
Claims23
A method for forming a fluid channel, comprising:
- providing a first member having a first thickness and a second member having a second thickness, the first thickness of the first member being at least about three times greater than the second thickness of the second member;
- securing the first member to the second member by a continuous weld to form an initial volume circumscribed by the weld between the first member and the second member;
- and
- pressurizing the initial volume until the second member permanently deforms to expand the initial volume by at least three times.
1 more element
A method for forming a semiconductor processing chamber, comprising:
- providing a first member having a first thickness and a second member having a second thickness, the first thickness of the first member being at least about three times greater than the second thickness of the second member;
- securing the first member to the second member by a continuous weld, the weld defining a first volume;
- forming the first member and second member to define a cylinder;
- and
- pressurizing the first volume until the second member permanently deforms relative to the first member to include a second volume that is at least three times greater than the first volume.
2 more elements
A sidewall for a chamber, comprising:
- a first member having a first thickness, the first member comprising at least a portion of a chamber body;
- a second member having an second thickness, the first thickness being at least about three times greater than the second thickness;
- and
- a containment region formed between the first member and the second member by a continuous weld bead, the containment region comprising an outer surface of the first member and a portion of the second member inward of the continuous weld bead, the portion of the second member having a third thickness that is less than the second thickness.
1 more element
Dependencies are inferred from the claim text.