Chuck for holding a device under test

A chuck for a probe station comprising:

• (a) a first chuck assembly element having a lower surface-and an upper surface thereon suitable to support a wafer;
• (b) a second chuck assembly element having an upper surface and a lower surface where the upper surface is in opposing relationship to said lower surface of said first chuck assembly element;
• (c) a chuck spacing mechanism interconnecting said first and second chuck assembly elements and defining the spacing between said first and second chuck assembly elements;
• (d) said chuck spacing mechanism including a first insulator having a first surface in pressing engagement with said upper surface of said second chuck assembly element and a second surface in pressing engagement with a first surface of a spacer, a second surface of said conductive spacer in pressing engagement with said lower surface of said first chuck assembly element.