US 2010/0109593 A1 · MULTI-DEGREE-OF-FREEDOM STAGE CONTROL SYSTEM

Abstract

There are included a plurality of actuators, an instruction generator for generating instructions of plural degrees of freedom, a position arithmetic unit for calculating positions of plural degrees of freedom from signals of a plurality of sensors, a control arithmetic unit for calculating operation amounts of plural degrees of freedom from the instructions of plural degrees of freedom and the positions of plural degrees of freedom, a thrust force conversion arithmetic unit for calculating thrust force instructions of the plurality of actuators from the operation amounts of the plural degrees of freedom, a current instruction unit for calculating current instructions which should be flowed to the plurality of actuators, and a sensor configuration input device for selecting a desired sensor configuration from among a plurality of sensor configurations. The positions of plural degrees of freedom are calculated by using a position arithmetic expression corresponding to a selected sensor configuration.

Claims14

Dependent claims

A multi-degree-of-freedom stage control system comprising:

a multi-degree-of-freedom stage structured by a plurality of actuators;
an instruction generator for generating instructions of plural degrees of freedom;
a position arithmetic unit for calculating positions of plural degrees of freedom from signals of a plurality of sensors attached to a control object,
a control arithmetic unit for calculating operation amounts of plural degrees of freedom from the instructions of plural degrees of freedom and the positions of plural degrees of freedom;
a thrust force conversion arithmetic unit for calculating thrust force instructions of the plurality of actuators from the operation amounts of the plural degrees of freedom;
a current instruction unit for calculating current instructions which should be flowed to the plurality of actuators;
and
a sensor configuration input device for selecting a desired sensor configuration from among a plurality of sensor configurations, wherein
the positions of plural degrees of freedom are calculated by using a position arithmetic expression corresponding to a selected sensor configuration.

6 more elements

A multi-degree-of-freedom stage control system comprising:

a multi-degree-of-freedom stage structured by a plurality of actuators;
an instruction generator for generating instructions of plural degrees of freedom;
a position arithmetic unit for calculating positions of plural degrees of freedom from signals of a plurality of sensors attached to a control object,
a control arithmetic unit for calculating operation amounts of plural degrees of freedom from the instructions of plural degrees of freedom and the positions of plural degrees of freedom;
a thrust force conversion arithmetic unit for calculating thrust force instructions of the plurality of actuators from the operation amounts of the plural degrees of freedom;
a current instruction unit for calculating current instructions which should be flowed to the plurality of actuators;
and
an actuator configuration input device for selecting a desired actuator configuration from among a plurality of actuator configurations, wherein
the thrust force instructions of the plurality of actuators are calculated by using a thrust force conversion arithmetic expression corresponding to a selected actuator configuration.

6 more elements

Dependencies are inferred from the claim text.

Multi-degree-of-freedom stage control system

Life of this patent

Multi-degree-of-freedom stage control system

Life of this patent

Abstract

Claims14