Ferroelectric recording medium and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSimon Buehlmann, Seung-bum Hong
Life of this patent
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Abstract
Provided are a ferroelectric recording medium and a method of manufacturing the same. The ferroelectric recording medium includes a substrate, a plurality of supporting layers which are formed on the substrate, each of the supporting layers having at least two lateral surfaces; and data recording layers formed on the lateral surfaces of the supporting layers. First and second data recording layers may be respectively disposed on two facing lateral surfaces of each of the supporting layers. The supporting layers may be polygonal pillars having at least three lateral surfaces. A plurality of the supporting layers can be disposed at uniform intervals in a two-dimensional array.
Claims15
A method of manufacturing a ferroelectric recording medium, the method comprising:
- forming a supporting layer on a substrate;
- patterning the supporting layer;
- forming source material layers on lateral surfaces of the patterned supporting layer;
- and
- diffusing a material of the source material layers into the patterned supporting layer.
A method of manufacturing a ferroelectric recording medium, the method comprising:
- forming a supporting layer on a substrate;
- forming a mask on the supporting layer to define a portion of the supporting layer;
- etching the supporting layer around the mask;
- placing a product of the etching in a gas atmosphere comprising a source material gas that reacts with the supporting layer to form a ferroelectric layer;
- heat-treating the etched product in the gas atmosphere comprising the source material gas;
- and
- removing the mask.
Dependencies are inferred from the claim text.