Sheet cutting device and cutting method
AssigneeLintec Corporation
InventorsHideaki NONAKA, Kan Nakata, Yoshiaki Sugishita, Kenji Kobayashi
Life of this patent
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Abstract
A cutting device 15 that, after a sheet S is stuck on a wafer W on a sticking table 13, cuts the sheet S along the outer edge of the wafer. The cutting device 15 comprises a robot body 62 disposed beside the sticking table 13 and a cutter blade 63 supported by a tool holding chuck 69 positioned at the front end of the robot body 62. The cutter blade 63 is detachably attached to the tool holding chuck 69 so as to be replaceable and is arranged so as to cut the sheet S in a state that the posture thereof is adjusted along a preset movement track.
Claims3
A sheet cutting device to cut a sheet stuck on an adherend on a sticking table, comprising:
- a robot body and a cutter blade supported on a free-end of the robot body, wherein
- said robot body is a multi-joint robot having a plurality of joints and these joints are controlled based on numerical information and includes a base portion positioned beside a sticking table supporting said adherend,
- wherein said robot body supports said cutter blade so as to adjust the posture of the cutter blade when cutting the sheet along the outer periphery of said adherend,
- said posture maintaining a toe-in angle with which the center line of the cutter blade is inclined with respect to the cutting direction viewed from the top in the cutting direction, and a blade edge of the cutter blade is positioned closer to the outer periphery of the adherend than the back portion of the cutter blade, a camber angle with which the center line of the cutter blade is inclined viewed from the front in the cutting direction, and said sheet is cut with no protrusion out of the outer periphery of said adherend, and a caster angle with which the center line of said cutter blade is inclined in the cutting direction viewed from the side in the cutting direction, and the angle formed between said sheet and the blade edge is kept at an acute angle.
Dependencies are inferred from the claim text.