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US 2010/0078557 A1Published application
Electron beam source and method of manufacturing the same
AssigneesCarl Zeiss NTS GmbH, Nanotools GmbH
InventorsVolker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer
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Abstract
A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Claims28
A source, comprising:
- a base;
- a tip fixed to the base and extending from the base, the tip comprising:
- a core having a surface comprising a first material;
- and
- a coating applied to the core, the coating comprising a second material, the second material forming a surface of the tip;
- a first electrical terminal electrically connected to the coating;
- an extraction electrode having an opening;
- and
- a second electrical terminal electrically connected to the extraction electrode,
- wherein:
- the source is an electron beam source;
- and
- at least one of the following conditions is fulfilled:
- an electrical conductivity of the first material is less than 105 S/m;
- an electrical conductivity of the second material is greater than 10−7 S/m;
- and
- a ratio of the electrical conductivity of the second material to the electrical conductivity of the first material is greater than 10:1.
14 more elements
A method, comprising:
- forming a core of a first material on a base using at least one deposition process selected from the group consisting of electron beam induced deposition and ion beam induced deposition;
- applying a coating of a second material on the core;
- and
- arranging the core opposite to an opening of an extraction electrode, thereby forming an electron beam source.
1 more element
Dependencies are inferred from the claim text.