Statistical spice model parameter calculation method, and statistical spice model parameter calculation device and program
AssigneeNEC Electronics Corporation
InventorTAKASHI SHIMIZU
Life of this patent
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Abstract
A statistical SPICE model parameter calculation method in which it is possible to create a variation model having high accuracy and size dependency. A principal component analysis is performed, for respective device sizes, of a measurement of an element characteristic value of a semiconductor device on which multipoint measurement is performed (principal component analysis process). A statistical SPICE model parameter that reproduces variation of an element characteristic value for a plurality of device sizes is calculated based on a result of the principal component analysis obtained for each of the device sizes and predetermined device size dependency (parameter calculation process).
Claims19
A statistical SPICE model parameter calculation method comprising:
- a principal component analysis process of performing a principal component analysis, for respective device sizes, of a measurement of an element characteristic value of a semiconductor device on which multipoint measurement is performed;
- and
- a parameter calculation process of computing a statistical SPICE model parameter that reproduces variation of an element characteristic value for a plurality of device sizes, based on a result of said principal component analysis obtained for each of said device sizes and a predetermined device size dependency.
A statistical SPICE model parameter calculation device comprising:
- a principal component analysis unit that performs principal component analysis, for respective device sizes, of a measurement of an element characteristic value of a semiconductor device on which multipoint measurement is performed;
- and
- a parameter calculation unit that calculates a statistical SPICE model parameter which reproduces variation of an element characteristic value for a plurality of device sizes, based on a result of said principal component analysis obtained for each of said device sizes, and a predetermined device size dependency.
A statistical SPICE model parameter calculation program coupled with a computer memory that executes on a computer:
- a process of performing a principal component analysis, for respective device sizes, of a measurement of an element characteristic value of a semiconductor device on which multipoint measurement is performed;
- and
- a process of calculating a statistical SPICE model parameter that reproduces variation of an element characteristic value for a plurality of device sizes, based on a result of said principal component analysis obtained for each of said device sizes, and a predetermined device size dependency.
Dependencies are inferred from the claim text.