Sampling inspection method
AssigneeUnited Microelectronics Corp.
InventorsKai-Ping Huang, Sung-Lin Tsai, Michael Kian Ann Wee, Boon-Wah Chong
Life of this patent
Estimating the term…
Abstract
A sampling inspection method is provided. The sampling inspection method is adapted for a multi-product production line including a plurality of tools. The sampling inspection method includes the steps of: providing a tool record, which records a sampling data of each of the tools; then checking each sampling data recorded in the tool record, and finding out at least one unsampled tool from the tools; then defining a plurality of product lots as being performed with process operations by at least one of the at least one unsampled tool; and determining at least one of the product lots for performing a sampling inspection.
Claims17
A sampling inspection method, adapted for a multi-product production line having a plurality of tools, comprising:
- providing a tool record, wherein the tool record records a sampling data of each of the tools;
- checking each sampling data recorded in the tool record, for finding out at least one unsampled tool from the tools;
- defining a plurality of product lots as being performed with at least one process operations by at least one of the unsampled tools;
- and
- determining at least one of the product lots for performing a sampling inspection.
A sampling inspection method, adapted for a multi-product production line having a plurality of tools, comprising:
- providing a tool record, wherein the tool record records a sampling data of each of the tools;
- checking each sampling data recorded in the tool record for finding out at least one unsampled tool from the tools;
- setting a process tool path comprising at least two unsampled tools;
- predetermining a product lot according to the process tool path;
- making the product lot to complete a product manufacturing procedure according to the process tool path;
- and
- performing a sampling inspection to inspect the product lot.
Dependencies are inferred from the claim text.