Micromachined imaging transducer
AssigneeSciMed Life Systems, Inc.
InventorsPaul W. Rehrig, Xiaoning Jiang, Wesley S. Hackenberger, Jian R. Yuan, Richard Romley
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Abstract
The present invention generally relates to medical devices, and more particularly to an improved medical imaging device. In one embodiment, an imaging device includes a drive shaft having proximal and distal ends received within the lumen; and an imaging transducer assembly. coupled to the distal end of the drive shaft and positioned at the distal portion of the elongate member. The imaging transducer assembly includes one or more imaging transducers formed with a piezoelectric composite plate using photolithography based micromachining.
Claims21
1-27. (canceled)
An imaging device configured to be located in an imaging catheter, said imaging device comprising:
- a drive shaft having proximal and distal ends;
- and
- an imaging transducer assembly coupled to the drive shaft, wherein the imaging transducer assembly includes at least one imaging transducer, wherein the at least one imaging transducer is formed from a photolithography based micromachined piezoelectric composite plate, wherein each imaging transducer includes a plurality of posts and each of the plurality of posts has a vertical etching profile of at least 80°.
An ultrasound imaging transducer, comprising:
- a plurality of posts formed by photolithography based micromachining of a piezoelectric composite plate, wherein each of the plurality of posts has an aspect ratio of post height to post width of at least 2 to 1;
- a plurality of kerfs separating the plurality of posts, wherein the plurality of kerfs are filled with a polymeric material;
- and
- an electrode pattern coupled to the plurality of posts.
A method of fabricating an ultrasound imaging transducer, the method comprising:
- forming a photoresist mask on a plate of piezoelectric material;
- forming a hard metal mask on portions of the plate exposed by the photoresist mask;
- removing the photoresist mask leaving the hard metal mask;
- etching portions of the plate exposed by the hard metal mask to form, in the plate, a plurality of posts and a plurality of kerfs between the posts, wherein each of the plurality of posts has an aspect ratio of post height to post width of at least 2 to 1;
- and
- filling the plurality of kerfs surrounding the plurality of posts with a polymeric material.
Dependencies are inferred from the claim text.