Polishing pad assembly with glass or crystalline window
AssigneeApplied Materials, Inc.
InventorsDominic J. Benvegnu, Jeffrey Drue David, Bogdan Swedek
Life of this patent
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Abstract
Methods and apparatus for providing a chemical mechanical polishing pad. The pad includes a polishing layer having a top surface and a bottom surface. The pad includes an aperture having a first opening in the top surface and a second opening in the bottom surface. The top surface is a polishing surface. The pad includes a window that includes a first portion made of soft plastic and a crystalline or glass like second portion. The window is transparent to white light. The window is situated in the aperture so that the first portion plugs the aperture and the second portion is on a bottom side of the first portion, wherein the first portion acts a slurry-tight barrier.
Claims10
An assembly for chemical mechanical polishing, comprising:
- a polishing pad having a polishing surface;
- a solid window situated in the polishing pad to provide optical access through the polishing pad, the solid window having a portion with a surface that is coplanar with the polishing surface of the polishing pad, wherein the solid window includes a bottom surface;
- and
- a gel applied to the bottom surface of the window so that the gel provides a medium for light to travel to the window.
A method of making a polishing pad, the method comprising:
- placing a body of crystalline or glass like material in a mold of a polishing pad window;
- dispensing a liquid precursor of a soft plastic material into the mold;
- curing the liquid precursor to form a transparent window that includes a soft plastic first portion and a crystalline or glass second portion;
- placing the window in a mold of a polishing pad;
- dispensing a liquid precursor of a polishing pad material into the mold of the polishing pad;
- and
- curing the liquid precursor of the polishing pad material to produce the polishing pad, wherein the window is situated in the mold of the polishing pad so that, when the polishing pad is produced, the window is situated in the polishing pad so the first portion has a surface that is coplanar with a polishing surface of the polishing pad and the first portion acts a slurry-tight barrier.
A method of making a polishing pad, the method comprising:
- placing a body of crystalline or glass materials in a mold of a polishing pad window;
- dispensing a liquid precursor of a soft plastic material into the mold;
- curing the liquid precursor to form a transparent window that includes a soft plastic first portion and a crystalline or glass second portion;
- forming a polishing layer that includes an aperture, the polishing layer having a top surface and a bottom surface, the aperture having a first opening in the top surface and a second opening in the bottom surface, the top surface being a polishing surface;
- and
- inserting the window in the aperture, the window being situated in the aperture so that the first portion has a surface that is coplanar with the polishing surface and the first portion plugs the aperture and acts a slurry-tight barrier and the second portion is on a bottom side of the first portion.
Dependencies are inferred from the claim text.