Large-area seed for ammonothermal growth of bulk gallium nitride and method of manufacture
AssigneeSoraa, Inc.
InventorsCHRISTIANE POBLENZ, James S. Speck
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Abstract
A high-quality, large-area seed crystal for ammonothermal GaN growth and method for fabricating. The seed crystal comprises double-side GaN growth on a large-area substrate. The seed crystal is of relatively low defect density and has flat surfaces free of bowing. The seed crystal is useful for producing large-volume, high-quality bulk GaN crystals by ammonothermal growth methods for eventual wafering into large-area GaN substrates for device fabrication.
Claims49
A method for fabricating crystalline material comprising:
- providing a crystalline substrate material having a first surface and a second surface;
- maintaining the crystalline substrate material by engaging the second surface while exposing the first surface;
- forming a first thickness of first crystalline material overlying the first surface of the crystalline substrate material, the first thickness of first crystalline material having a first orientation;
- providing the crystalline substrate material having the overlying first crystalline material;
- exposing the second surface of the crystalline substrate material;
- and
- forming a second thickness of second crystalline material overlying the second surface of the crystalline substrate material such that the second thickness of second crystalline material and the first thickness of first crystalline material are configured to be substantially free from bow.
A method for fabricating crystalline material comprising:
- providing a first crystalline substrate material having a first surface and a second surface;
- maintaining the first crystalline substrate material by engaging the second surface while exposing the first surface;
- forming a first thickness of first crystalline material overlying the first surface of the first crystalline substrate material, the first thickness of first crystalline material having a first orientation;
- providing a second crystalline substrate material having a first surface and a second surface;
- maintaining the second crystalline substrate material by engaging the second surface while exposing the first surface;
- forming a second thickness of second crystalline material overlying the first surface of the second crystalline substrate material, the second thickness of second crystalline material having a second orientation;
- attaching the first crystalline substrate and the second crystalline substrate at their second surfaces, such that the first crystalline material and second crystalline material are substantially free from bow.
A method for fabricating crystalline material comprising:
- providing a crystalline substrate material having a first surface and a second surface;
- maintaining the crystalline substrate material by engaging the second surface while exposing the first surface;
- forming a first crystalline material overlying the first surface of the crystalline substrate material, the first crystalline material having a first lattice constant;
- providing the crystalline substrate material having the overlying first crystalline material;
- exposing the second surface of the crystalline substrate material;
- forming a second crystalline material overlying the second surface of the crystalline substrate material, the second crystalline material having a second lattice constant, such that the lattice constant of the second crystalline material is substantially the same as the lattice constant of the first crystalline material.
A method for fabricating crystalline material comprising:
- providing a crystalline substrate material having a first surface and a second surface;
- maintaining the crystalline substrate material by engaging the second surface while exposing the first surface;
- forming a first crystalline material overlying the first surface of the crystalline substrate material;
- providing the crystalline substrate material having the overlying first crystalline material;
- exposing the second surface of the crystalline substrate material;
- forming a second crystalline material overlying the second surface of the crystalline substrate material such that the such that the resulting substrate is characterized by first crystalline material and second crystalline material possessing relatively bow-free surfaces.
A crystalline material comprising a first crystalline material overlying a first surface of a crystalline substrate and a second crystalline material overlying a second surface of a crystalline substrate such that the first crystalline material and second crystalline material possess surfaces that are substantially free from bow.
Dependencies are inferred from the claim text.