Diaphragm pump
AssigneeNEC Corporation
InventorsMitsuru Yamamoto, Kazuhito Murata, Sakae Kitajo
Life of this patent
Estimating the term…
Abstract
A pump chamber (15) is formed between a piezoelectric vibrator (7) and a valve main plate (10). The valve main plate (10) includes an inlet port (13) at its central portion, and an outlet port (14) in its peripheral portion, and the inlet port (13) is made in a smaller diameter than the outlet port (14). On the valve main plate (10) an inflow check valve (11) and an outflow check valve (12) are provided, so that when the inflow check valve (11) and the outflow check valve (12) open and close in response to the vibration of the piezoelectric vibrator (7), a fluid is introduced into and discharged from the pump chamber (15).
Claims20
A diaphragm pump, comprising:
- a pump chamber including a flexurally vibrating type diaphragm vibrator as a wall panel;
- an inlet port and an outlet port provided in said pump chamber;
- and
- a check valve provided at said inlet port and said outlet port respectively, to thereby convey a fluid by pumping action of intake and discharge caused by vibration of said diaphragm vibrator;
- wherein said inlet port is located at a central portion of said pump chamber, and said outlet port is located in a plurality of numbers in the vicinity of a peripheral portion of said pump chamber.
Dependencies are inferred from the claim text.