Reverse x-ray photoelectron holography device and its measuring method

A inverse X-ray photoelectron holography measurement method comprising:

• irradiating a measurement sample with an electron beam;
• varying the incident angle and the rotation angle of the electron beam by varying the orientation of the measurement sample in relation to the electron beam;
• and
• recording the intensity variations of a characteristic X-ray emitted when the measurement sample is excited, the variations being recorded as an atomic resolution hologram around an atom of a specific element;
• the inverse X-ray photoelectron holography measurement method characterized in comprising:
• detecting the intensity as a characteristic X-ray of the atom of the measurement sample, whereby an object wave is generated as an electron wave scattered by a reference wave and a neighboring atom in holography where electrons incident on the measurement sample reach an atom generating a specific X-ray as an electron wave;
• and
• monitoring the intensity of the electron beam for which an interference pattern is formed by compounding the reference wave and the object wave.

A inverse X-ray photoelectron holography measurement method, comprising:

• irradiating a measurement sample with an electron beam;
• varying the incident angle and the rotation angle of the electron beam by varying the orientation of the measurement sample in relation to the electron beam;
• and
• recording the intensity variations of a characteristic X-ray emitted when the measurement sample is excited, the variations being recorded as an atomic resolution hologram around an atom of a specific element;
• the inverse X-ray photoelectron holography measurement method characterized in comprising:
• using an inverse technique, which is an optical reciprocity theorem of ordinary X-ray photoelectron holography, to perform a Fourier transform on an electric signal of a hologram pattern recorded at various wavelengths;
• and
• analyzing an atomic image of an atom periphery generated by a characteristic X-ray on the measurement sample.