Semiconductor Device and Method of Fabricating the Same
AssigneeDongbu HiTek Co., Ltd.
InventorSung Joong Joo
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AssigneeDongbu HiTek Co., Ltd.
InventorSung Joong Joo
Estimating the term…
A method of fabricating a semiconductor device and a flash memory device are provided. The method of fabricating the semiconductor device includes: forming a nitride film on a semiconductor substrate; forming a sacrificial vertical structure on the nitride film; forming sacrificial spacers on lateral surfaces of the sacrificial vertical structure; performing an initial patterning of the nitride film using the sacrificial vertical structure and the sacrificial spacers as etch masks; removing the sacrificial spacers after the initial patterning of the nitride film and forming gate electrodes on the lateral surfaces of the sacrificial vertical structure; and removing the sacrificial vertical structure from between the gate electrodes and performing a secondary patterning of the nitride film using the gate electrodes as etch masks.
A method of fabricating a semiconductor device, comprising:
A flash memory device comprising:
A method of driving a flash memory device that includes a source region and a drain region that are spaced apart on a substrate;
Dependencies are inferred from the claim text.