Sample positioning stage and method of operation
AssigneeRenishaw PLC
InventorsDavid Roberts McMurtry, Ian Sean Bennell
Life of this patent
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Abstract
A sample positioning stage for positioning a sample to be inspected relative to an optical inspection device. The stage includes a first generally planar body on which a sample to be inspected can be carried and a second body directly coupled to the first body via bearings extending between them which constrain movement of the first body relative to the second body to a first plane that is substantially parallel to the plane of the first body. There is also provided a drive system being selectively operable in a first mode and a second mode.
Claims31
A sample positioning stage for positioning a sample to be inspected relative to an optical inspection device, the stage comprising:
- a first generally planar body on which a sample to be inspected can be carried;
- a second body directly coupled to the first body via bearings extending between them which constrain movement of the first body relative to the second body to a first plane that is substantially parallel to the plane of the first body;
- a drive system being selectively operable in a first mode to drive the first and second bodies in the first plane relative to each other toward a demanded relative position received from an electronic position input device, and a second mode in which the drive system provides less resistance to the relative movement of the first and second bodies in the first plane by an external force exerted on the first body than in the first mode, the drive system being engaged in both the first and second modes;
- and
- a selector operable to change the mode of operation from the first mode to the second mode in response to an input received at the stage.
A method of operating sample positioning stage having a first generally planar body on which a sample to be inspected can be carried and a second body directly coupled to the first body via bearings extending between them which constrain movement of the first body relative to the second body to a first plane that is generally horizontal and substantially parallel to the plane of the first body, and a drive system operable to move the first and second bodies relative to each other toward a first demanded relative position received from the position input device, the method comprising:
- i. operating the drive system in a first mode in which the drive system is operable to drive the first and second bodies in the first plane relative to each other toward a demanded relative position received from an electronic position input device, the drive system providing a first level of resistance to relative movement of the first and second bodies in the first plane by an external force exerted on one of the first and second bodies in the first plane;
- and
- ii. in response to an input received at the stage, subsequently operating the drive system in a second mode, in which the drive system provides a second level of resistance to the relative movement of the first and second bodies in the at least one degree of freedom by an external force exerted on one of the first and second bodies, the second level of resistance being less than the first level of resistance,
- in which the drive system is engaged in both the first and second modes.
A sample positioning stage for positioning a sample to be inspected relative to an optical inspection device, comprising:
- a first generally planar body on which a sample to be inspected can be carried;
- a second body directly coupled to the first body via bearings extending between them which constrain movement of the first body relative to the second body to a first plane that is substantially parallel to the plane of the first body;
- a drive system operable in a first mode to move the first and second bodies relative to each other toward a demanded relative position received from an electronic position input device;
- and
- a selector which is configured to detect the application of an external force exerted on the first body in the first plane and to change the mode of operation of the drive system from the first mode into a second mode on detection of the application of the external force, wherein in the second mode the drive system provides less resistance to the relative movement of the first and second bodies by an external force exerted on the first body than in the first mode.
Dependencies are inferred from the claim text.