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AssigneeKLA-Tencor Corporation
InventorsGuoheng Zhao, Geordie Zapalac, Samuel Ngai, Mehdi Vaez-Iravani, Ady Levy, Vineet Dharmadhikari
Estimating the term…
To increase inspection throughput, the field of view (FOV) of an IR camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation (e.g. optical or electrical) can be provided to the sample and IR images can be captured using the IR camera. Moving the FOV, providing the modulation, and capturing the IR images can be synchronized. The IR images can be filtered to generate the time delay LIT, thereby providing defect identification. In one embodiment, this filtering accounts for the number of pixels of the IR camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the FOV throughout the moving, thereby providing an improved signal-to-noise ratio (SNR) during filtering.
A method of performing time delay lock-in thermography (LIT) on a sample, the method comprising:
(canceled)
A method of performing dark field lock-in thermography (LIT) on a sample, the method comprising:
(canceled)
A system for performing time delay lock-in thermography (LIT) on a sample, the system comprising:
(canceled)
A system for performing dark field, lock-in thermography (LIT) on a sample, the system comprising:
(canceled)
Dependencies are inferred from the claim text.