Tune Range Limiter
AssigneeMKS Instruments, Inc.
InventorsDaniel H. Cotter, Sean O. Harnett
Life of this patent
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Abstract
An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.
Claims21
An impedance matching network, comprising:
- a first input port that receives radio frequency (RF) power and includes an input impedance;
- an output port that provides the RF power and includes an output impedance;
- and
- a variable capacitance module that varies the output impedance and comprises
- a first variable capacitor;
- a second variable capacitor;
- a first motor;
- and
- a second motor that adjusts a capacitance of the second variable capacitor, wherein a relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.
An impedance matching network, comprising:
- a first input port that receives radio frequency (RF) power and includes an input impedance;
- an output port that provides the RF power and includes an output impedance;
- and
- a variable capacitance circuit that varies the output impedance and comprises
- a first variable capacitor;
- a second variable capacitor;
- a first motor that includes an output shaft that rotates to a first position wherein the first position corresponds with a first capacitance of the first variable capacitor;
- and
- a second motor that includes an output shaft that rotates to a second position wherein the second position corresponds with a second capacitance of the second variable capacitor and wherein a relationship between a desired value of the first capacitance and an actual value of the first capacitance is dependent on the second position.
A method of operating an impedance matching network, comprising:
- receiving radio frequency (RF) power via an input that includes an input impedance;
- providing the RF power at an output that includes an output impedance;
- and
- adjusting first and second capacitances to vary the output impedance, wherein a relationship between a desired value of the second capacitance and an actual value of the second capacitance is dependent on the value of the first capacitance.
Dependencies are inferred from the claim text.