Apparatus for obtaining planarity measurements with respect to a probe card analysis system
AssigneeRudolph Technologies, Inc.
InventorsJohn T. Strom, Raymond Kraft
Life of this patent
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Abstract
A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce “effectively loaded” planarity measurements.
Claims19
A method of obtaining planarity measurements in a probe card analysis system;
- said method comprising:
- measuring a planarity of a probe card;
- computing planarity effects due to fiducial plate deflection;
- card fixture deflection;
- and
- calculating a load compensated planarity for said probe card by applying to the measured planarity of the probe card the computed planarity effects due to fiducial plate deflection.
A method of obtaining a combined deflection measurement for deflections of a probe card and a probe card fixture;
- said method comprising:
- obtaining measurements of optical planarity and measurements of electrical planarity for all non-bussed probes;
- identifying fiducial plate deflection at first electrical contact at all non-bussed probe locations;
- calculating planarity effects due to fiducial plate deflection and, responsive to said obtaining and said identifying, calculating a load compensated planarity for said probe card by applying to the measured planarity of the probe card the planarity effects due to fiducial plate deflection.
A computer readable medium encoded with data and instructions for obtaining planarity measurements with respect to the tips of an array of probes on a probe card under inspection by an inspection apparatus, said data and said instructions causing said inspection apparatus executing said instructions to:
- measuring a planarity of the probe card;
- compute planarity effects due to fiducial plate deflection;
- and
- calculate a load compensated planarity for said probe card by applying to the measured planarity of the probe card the computed planarity effects due to fiducial plate detection.
Dependencies are inferred from the claim text.