Electro-Mechanical Switches and Methods of Use Thereof
AssigneeMassachusetts Institute of Technology
InventorsWilliam J. Arora, Karen K. Gleason, George Barbastathis, Wyatt E. Tenhaeff
Life of this patent
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Abstract
One aspect of the invention relates to an ultrathin micro-electromechanical chemical sensing device which uses swelling or straining of a reactive organic material for sensing. In certain embodiments, the device comprises a contact on-off switch chemical sensor. For example, the device can comprises a small gap separating two electrodes, wherein the gap can be closed as a result of the swelling or stressing of an organic polymer coating on one or both sides of the gap. In certain embodiments, the swelling or stressing is due to the organic polymer reacting with a target analyte.
Claims33
An apparatus comprising:
- a microcantilever element having a top surface and a bottom surface;
- and a substrate element positioned under the microcantilever element with a gap therebetween;
- wherein the substrate element comprises nano- or microfabricated conductive lines having at least two electrical leads;
- the top surface of the microcantilever element is coated with a polymer having a thickness of between about 0.1 nm and about 300 nm;
- and the bottom surface of the microcantilever element is electrically conductive, or coated with an electrically conductive material.
4-6. (canceled)
8-30. (canceled)
32-34. (canceled)
37-39. (canceled)
41-63. (canceled)
An apparatus comprising an element whose surface is divided by a trench into a first section and a second section;
- wherein the trench has a first wall, a second wall and a width therebetween;
- the first section is coated with a first polymer having a thickness of between about 0.1 nm and about 500 nm;
- the second section is coated with a second polymer having a thickness of between about 0.1 nm and about 500 nm;
- the first wall is coated with a third polymer having a thickness of between about 0.1 nm and about 500 nm;
- the second wall is coated with a fourth polymer having a thickness of between about 0.1 nm and about 500 nm;
- and at least the first section and the second section, or at least the first wall and the second wall, further comprise a conductive material connected to at least two electrical leads.
65-67. (canceled)
70-90. (canceled)
92-97. (canceled)
100-120. (canceled)
An apparatus comprising:
- a first element having a top and bottom;
- and a second element having a top and bottom;
- wherein the bottom of the first element is positioned facing the top of the second element with a gap therebetween;
- the bottom of the first element is coated with a polymer having a thickness of between about 0.1 μm and about 500 μm;
- the polymer is electrically conducting or is coated with an electrically conductive material;
- and the top of the second element is electrically insulating and comprises on its surface non-contiguous electrically conducting material connected to at least two electrical leads.
(canceled)
125-148. (canceled)
150-153. (canceled)
156-179. (canceled)
Dependencies are inferred from the claim text.