Method for determination of resonant frequencies of a rotor using magnetic bearings
AssigneeOerlikon Leybold Vacuum GmbH
InventorUlrich Jung
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Abstract
The resonant frequencies of a rotor supported on magnetic bearings, in particular a rotor of a turbomolecular vacuum pump, are determined. While the rotor is stationary or the rotor is rotating at a relatively low rotation frequency, mechanical oscillations of the rotor are generated by electromagnets in the magnetic bearing. The rotor oscillations are detected by rotor-position sensors in the magnetic bearing. The resonant frequencies of the rotor are determined from the detected rotor-position oscillations.
Claims11
A method for the determination of resonant frequencies of a rotor using magnetic bearings, comprising the following steps:
- generating mechanical oscillations of the rotor by electromagnets of the magnetic bearing,
- detecting the rotor oscillations by means of rotor-position sensors of the magnetic bearing, and
- determining the resonant frequencies of the rotor from the detected oscillations.
A method of determining resonant frequencies of a rotor, the method comprising:
- (a) rotating a rotor which is supported by electromagnetic bearings at a rotational speed below a rated rotational speed;
- (b) controlling the electromagnetic bearings to cause the rotor to oscillate at each of a plurality of oscillation frequencies over a range of rotational frequencies;
- (c) detecting rotor oscillations with rotor position sensors of the electromagnetic bearings;
- (d) from the detected rotor oscillations, determining resonance frequencies of the rotor.
Dependencies are inferred from the claim text.