Nano-imprint lithography template fabrication and treatment
AssigneeMolecular Imprints, Inc.
InventorsGerard M. Schmid, Weijun Liu, Edward Brian Fletcher, Frank Y. Xu, Fen Wan
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Abstract
A nano-imprint lithography template includes a rigid support layer, a cap layer, and a flexible cushion layer positioned between the support layer and the cap layer. Treating an imprint lithography template includes heating the template to desorb gases from the template. Heating the template includes radiating the template at a selected wavelength with, for example, infrared radiation. The selected wavelength may correspond to a wavelength at which the template material is strongly absorbing.
Claims20
A nano-imprint lithography template comprising:
- a rigid support layer;
- a nano-imprint lithography cap layer having features configured to imprint a pattern within a polymerizable liquid;
- and
- a flexible cushion layer positioned between the support layer and the cap layer.
A method of treating a nano-imprint lithography template in a nano-imprint lithography system, the method comprising heating the nano-imprint lithography template to remove adsorbed gas from the nano-imprint lithography template.
A nano-imprint lithography method comprising:
- depositing a first portion of polymerizable material on a first nano-imprint lithography substrate;
- contacting the first portion of the polymerizable material with a nano-imprint lithography template coupled to a nano-imprint lithography system;
- solidifying the polymerizable material;
- separating the nano-imprint lithography template from the solidified material;
- heating the nano-imprint lithography template to remove adsorbed gases from the nano-imprint lithography template;
- cooling the nano-imprint lithography template to ambient temperature;
- depositing a second portion of polymerizable material on a second nano-imprint lithography substrate;
- contacting the second portion of the polymerizable material with the cooled nano-imprint lithography template;
- solidifying the polymerizable material;
- and
- separating the nano-imprint lithography template from the solidified material.
Dependencies are inferred from the claim text.