Semiconductor apparatus with thin semiconductor film
AssigneeOki Data Corporation
InventorsMitsuhiko Ogihara, Hiroyuki Fujiwara, Masaaki Sakuta, Ichimatsu Abiko
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Abstract
A semiconductor apparatus includes a substrate having at least one terminal, a thin semiconductor film including at least one semiconductor device, the thin semiconductor film being disposed and bonded on the substrate; and an individual interconnecting line formed as a thin conductive film extending from the semiconductor device in the thin semiconductor film to the terminal in the substrate, electrically connecting the semiconductor device to the terminal. Compared with conventional semiconductor apparatus, the invented apparatus is smaller and has a reduced material cost.
Claims7
A semiconductor apparatus including a circuit board and a semiconductor chip mounted thereon, the semiconductor chip comprising:
- a semiconductor substrate having a substantially planarized surface, having an integrated circuit formed therein, and having at least one terminal electrically connected to the integrated circuit;
- a thin semiconductor film including at least one semiconductor device, the thin semiconductor film being disposed on the substantially planarized surface of the semiconductor substrate, an under surface of the thin semiconductor film facing the semiconductor substrate being closely bonded to the substantially planarized surface of the semiconductor substrate, the thin semiconductor film being less than about 10 μm thick, and forming a step with the semiconductor substrate;
- and
- an individual interconnecting line formed as a thin conductive film extending from an upper surface of the semiconductor device in the thin semiconductor film, along a top surface of the thin semiconductor film to an edge thereof, along a rise of the step, and to the terminal on the semiconductor substrate, respectively, and electrically connecting the semiconductor device to the terminal.
Dependencies are inferred from the claim text.