Method for Forming a Memory Cell Comprising a Capacitor Having a Strontium Titaniumoxide Based Dielectric Layer and Devices Obtained Thereof

Abstract

A method is disclosed for manufacturing SrxTiyO3 based metal-insulator-metal (MIM) capacitors using a low temperature Atomic Layer Deposition (ALD) process. Preferably TiN is used to form the bottom electrode. The Sr/Ti ratio in the SrxTiyO3 dielectric layer of the capacitor can be varied to tune the electric properties of the capacitor. The dielectric constant and the leakage current of the SrxTiyO3 dielectric layer decrease monotonously with the Sr content of this SrxTi1-xO3 dielectric layer. By increasing the Sr content at the interface between the SrxTiyO3 dielectric layer and the TiN bottom electrode, the interfacial equivalent-oxide thickness (EOT) can be further reduced.

Dependencies are inferred from the claim text.