Method for manufacturing a stamper

A method for manufacturing a stamper comprising the steps of:

• a first step comprising:
• forming a conductive film on a concavo-convex pattern of an original disk;
• forming an electroformed layer on the conductive film;
• and
• peeling off the conductive film and the electroformed layer from the original disk so as to provide a father stamper;
• a second step comprising:
• forming a releasing layer on a concavo-convex pattern of the father stamper;
• forming an electroformed layer on the releasing layer;
• and
• peeling off the electroformed layer from the father stamper so as to provide a mother stamper;
• and
• a third step comprising:
• forming a conductive film on at least one of a bottom surface of a concave portion and a top surface of a convex portion of the concavo-convex pattern in at least the mother stamper;
• forming a releasing layer on the conductive film, which is followed by forming a electroformed layer thereon;
• and
• peeling off the electroformed layer so as to provide a son stamper.