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US 2010/0072061 A1Published application
Sputtering apparatus for forming thin film
AssigneeYamaguchi University
InventorShinichi Morohashi
Life of this patent
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Abstract
A sputtering apparatus for forming a thin film includes a pair of facing polygonal prism target holders in which a target is placed on each surface which is parallel to a rotation axis of a rotatable polygonal prism body. A magnetic pole group which includes either a plurality of magnets or a magnet and a yoke is disposed on a back surface of the target, and the magnetic pole group includes magnets or yokes of different magnetic pole directions.
Claims21
A sputtering apparatus for forming a thin film, comprising:
- a pair of facing polygonal prism target holders in which a target is placed on each surface which is parallel to a rotation axis of a rotatable polygonal prism body,
- wherein a magnetic pole group which includes either a plurality of magnets or a magnet and a yoke is disposed on a back surface of the target, and the magnetic pole group includes magnets or yokes of different magnetic pole directions.
Dependencies are inferred from the claim text.