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US 2010/0072056 A1Published application
Substrate holders for uniform reactive sputtering
AssigneeSeagate Technology LLC
InventorThomas Nolan
Life of this patent
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Abstract
A substrate holder for a substrate including a frame body having an opening for the placement of the substrate. The frame body also includes a hollow portion therein. The substrate holder may be used in a sputtering apparatus for sputtering material onto the substrate. The substrate holder is particularly advantageous in the manufacturing of magnetic recording medium.
Claims20
A holder for a substrate, the holder comprising:
- a frame body;
- at least one opening in the frame body operable to hold a substrate;
- and
- at least one hollow section within the frame,
- wherein the at least one hollow section is operable to reduce consumption of reactive gas in a reactive sputtering chamber.
2 more elements
A method of forming a substrate holder comprising:
- providing a frame body with an opening operable to hold a substrate for a magnetic recording media;
- and
- hollowing a portion of the frame body to reduce consumption of reactive gas in a reactive sputtering chamber.
A method of reactive sputtering comprising:
- providing a sputtering chamber including a sputtering cathode therein;
- providing a reactive gas inside the sputtering cathode;
- placing a substrate in a substrate holder, the substrate holder comprising a frame body including a metal, at least one opening in the frame body operable to hold the substrate, and at least one hollow section within the frame body;
- placing the substrate and substrate holder within the sputtering chamber;
- and
- sputtering material onto at least one surface of the substrate.
3 more elements
Dependencies are inferred from the claim text.