Carbon nanotube manufacturing apparatus, carbon nanotube manufacturing method, and radical producing apparatus

A carbon nanotube manufacturing method comprising:

• generating plasma including ions, radicals, and electrons, from gas;
• applying a voltage to a shielding electrode unit that includes at least two shielding electrodes that are arranged one above another, each of the shielding electrodes having at least one opening;
• preventing the ions and the electrons from entering a carbon nanotube manufacturing unit that manufactures carbon nanotubes from the radicals, and allowing the radicals to enter the carbon nanotube manufacturing unit;
• and
• manufacturing the carbon nanotubes from the radicals.

A radical producing apparatus comprising:

• a plasma generating unit that generates plasma including ions, radicals, and electrons, from gas;
• a shielding electrode unit that prevents the ions and the electrons from being released to outside thereof and releases the radicals to the outside thereof;
• and
• a bias applying unit that applies a voltage to the shielding electrode unit, wherein
• the shielding electrode unit includes at least two shielding electrodes that are arranged one above another, each of the shielding electrodes having at least one opening.