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US 2010/0072043 A1Published application
Electromechanical switch with partially rigidified electrode
AssigneeIntel Corporation
InventorsHanan Bar, Tsung-Kuan Allen Chou
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Abstract
An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode and includes a rigidification structure. The contact is mounted to the suspended electrode. The signal line is positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode.
Claims4
A switch, comprising:
- an actuation electrode;
- a suspended cantilever electrode suspended proximate to the actuation electrode, the suspended cantilever electrode including a fixed end, a free moving distal end, and a rigidification structure;
- a contact mounted to the suspended cantilever electrode at an intermediate location between the fixed end and the free moving distal end;
- and
- a signal line positioned proximate to the suspended cantilever electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended cantilever electrode,
- wherein the rigidification structure is disposed in or on the suspended cantilever electrode and localized about the contact to rigidity a portion of the suspended cantilever electrode surrounding the contact.
3 more elements
A switch, comprising:
- an electrostatic actuation electrode disposed on a substrate;
- a rigid plate electrode suspended proximate to the electrostatic actuation electrode, the rigid plate electrode secured to the substrate with an anchor;
- a plurality of dimples at least on an underside of the rigid plate electrode;
- a signal line positioned proximate to the rigid plate electrode to form a closed circuit when an actuation voltage is applied between the electrostatic actuation electrode and the rigid plate electrode.
1 more element
Dependencies are inferred from the claim text.