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US 2010/0071467 A1Published application
Integrated multiaxis motion sensor
AssigneeInvenSense, Inc.
InventorsSTEVE NASIRI, JOSEPH SEEGER, BRUNO BOROVIC, GOKSEN YARALIOGLU
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AssigneeInvenSense, Inc.
InventorsSTEVE NASIRI, JOSEPH SEEGER, BRUNO BOROVIC, GOKSEN YARALIOGLU
Estimating the term…
A system and method describes an inertial sensor assembly, the assembly comprises a substrate parallel to the plane, at least one in-plane angular velocity sensor comprising a pair proof masses that are oscillated in anti-phase fashion along an axis normal to the plane. The first in-plane angular velocity sensor further includes a sensing frame responsive to the angular velocity of the substrate around the first axis parallel to the plane and perpendicular to the axis normal to the plane. The assembly also includes at least one out-of-plane angular velocity sensor comprising a pair of proof masses that are oscillated in anti-phase fashion in the plane parallel to the plane. The out-of-plane angular velocity sensor further comprises a sensing frame responsive to the angular velocity of the substrate around the axis normal to the plane.
An inertial sensor assembly comprising:
An inertial sensor assembly comprising:
An inertial sensor assembly comprising:
Dependencies are inferred from the claim text.