Pressure sensor with integrated test device and method for testing such a sensor
OwnerJosef Glaserinventor
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Abstract
The invention relates to a pressure sensor comprising a housing, a membrane and at least one measuring element for measuring a pressure acting upon the membrane from outside the housing. The pressure sensor also comprises a channel system, inside the housing, which system can be filled with a test medium. The channel system comprises at least one pressure chamber. The pressure chamber is arranged in such a manner that a defined test pressure applied therein produces a known pressure change in the measuring element.
Claims12
A pressure sensor comprising a housing, a membrane as well as at least one measuring element for measuring a pressure acting onto the membrane from the outside of the housing, further comprising a channel system within the housing, the channel system being configured to be filled with a test medium, wherein the channel system at least defines a pressure chamber, which is arranged in such a manner that a defined test pressure applied therein generates a known pressure change in the measuring element.
Dependencies are inferred from the claim text.