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US 2010/0064973 A1Published application
Apparatus and method for making carbon nanotube array
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsKai-Li Jiang, Kai Liu, Shou-Shan Fan
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Abstract
An apparatus for making an array of carbon nanotubes includes a reaction chamber with a gas inlet and a gas outlet, a quartz boat disposed in the reaction chamber, a substrate with a surface deposited with a film of first catalyst, and a second catalyst disposed in the quartz beside the substrate. The substrate is disposed in the quartz boat.
Claims16
An apparatus for making an array of carbon nanotubes, comprising:
- a reaction chamber having a gas inlet introducing a carbon source gas and a carrier gas thereinto and a gas outlet;
- a substrate having a layer of first catalyst provided thereon, the substrate being disposed in the reaction chamber;
- and
- a second catalyst reacting with the carbon source gas thereby producing a resultant product promoting catalytic activity of the first catalyst, wherein the reaction chamber defines a first carbon source gas route towards the substrate;
- the second catalyst is disposed on the route.
2 more elements
An apparatus for making an array of carbon nanotubes, comprising:
- a reaction chamber having a gas inlet introducing a carbon source gas and a carrier gas thereinto and a gas outlet;
- a substrate having a layer of first catalyst provided thereon, the substrate being disposed in the reaction chamber;
- a second catalyst reacting with the carbon source gas thereby producing a resultant product promoting catalytic activity of the first catalyst;
- and
- a tubular boat receiving the substrate and the second catalyst therein, the tubular boat having an open end introducing the carbon source gas thereinto and an opposite closed end blocking and directing the introduced carbon source gas in the boat to flow toward the substrate, wherein the second catalyst is disposed in the boat in a manner to enable the resultant product associated with the second catalyst to forcedly flow toward the substrate.
2 more elements
An apparatus for making an array of carbon nanotubes, comprising:
- a reaction chamber having a gas inlet and a gas outlet;
- a hollow container disposed in the reaction chamber and having only one opening oriented to the gas inlet;
- a substrate contained in the hollow container, the substrate having a top surface, a bottom surface contacting the hollow container, and a side surface extending from the top surface to the bottom surface;
- a first catalyst disposed on the top surface;
- a second catalyst contained in the hollow container and distributed along the side surface of the substrate except at parts of the side surface facing the gas inlet.
2 more elements
Dependencies are inferred from the claim text.