Carrier head using flexure restraints for retaining ring alignment
AssigneeApplied Materials, Inc.
InventorsJin Yi, Jeonghoon Oh, Hung Chih Chen, Samuel Chu-Chiang Hsu
Life of this patent
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Abstract
One embodiment provides a retaining ring assembly. The retaining ring assembly comprises a retaining ring configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring, and a flexure coupled to the retaining ring. The flexure is configured to maintain a gap between an inner surface of a carrier ring and an outer surface of the retaining ring, and the carrier ring is circumferentially surrounding the retaining ring.
Claims22
A retaining ring assembly, comprising:
- a retaining ring configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring;
- and
- a flexure coupled to the retaining ring, wherein the flexure is configured to maintain a gap between an inner surface of a carrier ring and an outer surface of the retaining ring, and the carrier ring is circumferentially surrounding the retaining ring, and the flexure comprises a plate having a slot that extends substantially down a length of the plate.
(canceled)
A carrier head for retaining a substrate during processing, comprising:
- a retaining ring configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring;
- a carrier ring circumferentially surrounding the retaining ring;
- and
- a flexure coupled between the carrier ring and retaining ring, wherein the flexure is substantially resistive to movement of the retaining ring in a direction perpendicular to an inner surface of the carrier ring and substantially non resistive to movement of the retaining ring in a direction parallel to the inner surface of the carrier ring, and the flexure comprises a plate having a slot that extends substantially down a length of the plate.
A polishing head assembly for retaining a substrate during polishing, comprising:
- a carrier head;
- an annular flexible membrane coupled to the carrier head;
- a retaining ring, configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring, coupled to the annular flexible membrane a carrier ring circumferentially surrounding the retaining ring and coupled to the carrier head;
- and
- a flexure coupled between the carrier ring and retaining ring, wherein the flexure comprises a plurality of plates evenly distributed along the retaining ring and the carrier ring.
(canceled)
Dependencies are inferred from the claim text.