CMP System with Wireless Endpoint Detection System
AssigneeStrasbaugh
InventorsRandolph E. Truer, Michael Starman
Life of this patent
Estimating the term…
Abstract
A CMP polishing pad with an optical sensor assembly embedded in the pad, connected to a transceiver and/or power supply mounted at the center of the pad or at the outer edge of the pad which communicates wirelessly with a control system.
Claims5
A polishing pad assembly for use in a CMP process using a sensor assembly to detect the progress of the CMP process, said polishing pad assembly comprising:
- a polishing pad comprising a polishing layer and separate sub-layer connected by a layer of adhesive;
- a sensor assembly disposed within the pad, said sensor assembly being operable to detect a condition of a wafer while said wafer is being polished;
- a ribbon cable for connecting the optical sensor to a transceiver for communicating data generated by the sensor assembly.
A CMP system for polishing a wafer, said CMP system comprising:
- a platen:
- a polishing pad assembly comprising:
- a polishing pad comprising a polishing layer and a layer of adhesive;
- a sensor assembly disposed within the pad, said sensor assembly being operable to detect a condition of a wafer while said wafer is being polished;
- a ribbon cable for connecting the optical sensor to a transceiver for communicating data generated by the sensor assembly;
- wherein the ribbon cable and the adhesive layer are substantially the same thickness, and the ribbon cable is disposed in a channel running through the adhesive layer.
- a first transceiver mounted on the periphery of the platen, said first transceiver operable to receive data from the sensor assembly and transmit said data to a receiver;
- a receiver, located on a non rotating portion of the polishing tool, adapted for communication of data from the sensor assembly through the first transceiver, said receiver operably connected to a control system, said control system programmed to analyze the data from the sensor assembly to determine and report the state of a wafer being polished in the CMP system.
A method of manufacturing a polishing pad assembly for use in polishing a wafer on a polishing pad which is secured to a platen, said method comprising the steps of:
- providing a polishing pad with a layer of adhesive covering a surface of the polishing pad;
- providing a sensor assembly having a thickness not exceeding the thickness of the polishing pad;
- providing a ribbon cable adapted for connection to the sensor assembly
- cutting a hole in the polishing pad to accommodate the sensor assembly within the thickness of the pad;
- creating a channel in the layer of adhesive;
- fixing the ribbon cable to the sensor assembly;
- laying the polishing pad on a platen with the layer of adhesive contacting the platen and the ribbon cable disposed within the channel;
- securing a transceiver and power supply to the platen, and connecting the ribbon cable to the transceiver and power supply.
A method of manufacturing a polishing pad assembly for use in polishing a wafer on a polishing pad which is secured to a platen, said method comprising the steps of:
- providing a polishing pad with a layer of adhesive covering a surface of the polishing pad;
- providing a sub-pad with a layer of adhesive covering a surface of the sub-pad;
- providing a sensor assembly having a thickness not exceeding the thickness of the polishing pad;
- providing a ribbon cable adapted for connection to the sensor assembly
- cutting a hole in the polishing pad to accommodate a first portion of sensor assembly;
- cutting a hole in the polishing pad to accommodate a second portion of sensor assembly;
- creating a channel in the layer of adhesive covering one of the polishing pad and sub-pad;
- placing the sensor assembly into the holes in the polishing pad and sub-pad;
- fixing the ribbon cable to the sensor assembly;
- laying the sub-pad on a platen with the layer of adhesive contacting the platen, and laying the polishing pad over the sub-pad with the layer of adhesive contacting the sub-pad, with the ribbon cable disposed within the channel;
- securing a transceiver and power supply to the platen, and connecting the ribbon cable to the transceiver and power supply.
Dependencies are inferred from the claim text.