Method of polishing amorphous/crystalline glass to achieve a low rq & wq
AssigneeSeagate Technology LLC
InventorsIan Beresford, Robert Lloyd Babcock
Life of this patent
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Abstract
A method of polishing to reduce surface roughness of at least one surface of a glass ceramic substrate that includes an amorphous glass portion and a crystalline portion. The method comprises at least one step of polishing the surface using a polishing pad and an abrasive polishing slurry. The polishing slurry comprises a first concentration of Ceria particulates and a second concentration of Silica particulates. The amorphous glass portion and the crystalline portion of the at least one surface are polished substantially equally.
Claims19
A method of polishing at least one surface of a glass ceramic substrate including an amorphous glass portion and a crystalline portion to reduce surface roughness of the at least one surface, the method comprising at least one step of polishing the at least one surface using a polishing pad and an abrasive polishing slurry, the polishing slurry comprising a first concentration of Ceria particulates and a second concentration of Silica particulates,
- wherein the amorphous glass portion and the crystalline portion of the at least one surface are polished substantially equally.
A method of polishing at least one surface of a glass ceramic substrate including an amorphous glass portion and a crystalline portion to reduce surface roughness of the at least one surface, wherein said substrate is usable as a substrate for a magnetic or magneto-optical (MO) data/information storage retrieval medium, the method comprising at least one step of polishing the at least one surface using a polishing pad and an abrasive polishing slurry, the polishing slurry comprising a first concentration of Ceria particulates having a size range between 30 and 50 nm and a second concentration of Silica particulates with a range of 15 nm-45 nm.
A glass ceramic substrate for a magnetic or magneto-optical (MO) data/information storage retrieval medium comprising:
- an amorphous glass portion;
- a crystalline portion;
- a surface roughness below 3 Å;
- and
- a surface waviness below 2 Å.
Dependencies are inferred from the claim text.